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홈 > 검사장비 > 반도체 검사장비Semiconductor Inspection Equipment
Wafer Auto Inspection System
Specifications
| Wafer size | ø200mm~300mm |
|---|---|
| Microscope (micro) inspection | |
| Total magnification | 25x to 1,500x |
| Inspection modes | Brightfield, darkfield, 3D Laser Scanning (Option) |
| Autofocus | Laser AF or Illumination slit projection |
| Macro inspection | Surface Macro, backside Macro Halogen Spotlight illumination |
| Macro inspection illumination | Halogen Spotlight & UV 형광 illumination illumination |
| Load port | 1 FOUP (or 1 FOSB: option) Position selectable from front, side or rear |
| Wafer transfer | Robotic handling; vacuum chuck; noncontact pre-alignment mechanism |
| WAFER ALIGNMENT | Non-contact Centering |
| Operation | Touch panel GUI, mouse, keyboard |
| UPH | 50-60WPH |
| Power | 220VAC, 50/60HZ, 10A |
| Compressed Air | 4.5kgf/cm2 dry air, 50 litre / minute |
Options
| Laser 3D Microscope | Magnification : -108x-17,280x |
|---|---|
| Height, Width, Roughness Measurment | |
| Pattern Auto Capture | |
| Auto Review inspection System | Auto Stage moving ( Recipe Mode) |
| Pattern Auto Capture | |
| Auto Measurment | |
| IR inspection System | 웨이퍼 레벨 CSP의 비파괴 검사 |
| 융합 or구리 배선의 부식에 의한 누출과 수지의 peeling검사 | |
| WAFER ID READER | OCR: IBM font, Triple font, SEMI font (SEMI M12, M13 & M1.15) |
| 2D Data Matrix ( ECC200, 8x32 ): SEMI T7, M1.15 | |
| Barcode : IBM412 & BC412 (SEMI T1-95) | |
| ULPA boronless FFU (fan filter unit) | Option |
| HOST INTERFACE OR SECS-GEM CAPABILITY | Option |
Wafer Auto Inspection System
Specifications
| Wafer size | Magnification : -108x-17,280x |
|---|---|
| Height, Width, Roughness Measurment | |
| Pattern Auto Capture | |
| Wafer cassette | Auto Stage moving ( Recipe Mode) |
| IR inspection System | 웨이퍼 레벨 CSP의 비파괴 검사 |
| 융합 or구리 배선의 부식에 의한 누출과 수지의 peeling검사 | |
| Wafer ID Reader | OCR: IBM font, Triple font, SEMI font (SEMI M12, M13 & M1.15) |
| 2D Data Matrix ( ECC200, 8x32 ): SEMI T7, M1.15 | |
| Barcode : IBM412 & BC412 (SEMI T1-95) | |
| ULPA boronless FFU (fan filter unit) | Option |
| HOST INTERFACE OR SECS-GEM CAPABILITY | Option |
| UPH | 400 wafers |
| 1750 x 1750 x 2000 mm | |
| Power | 220VAC, 50/60HZ, 10A |
| 4.5kgf/cm2 dry air, 50 litre / minute | |
| Approximately 800kg |
