주식회사이엠피코리아
측정장비
Ellipsometer
홈 > 측정장비 > Ellipsometer
Automatic Stage Type with Mapping Function
3 models are available for φ150, 200 and 300mm samples.
Auto mapping R-Θ stage and auto focus function make it possible to measure film thickness of
entire sample surface and dispay film thicknes distribution by color map.
Features
High-speed measurement
The snapshot measurement method is realized and the high-speed measurement is 20ms per pointVisible Spectral Range
The spectral wavelength range can be selected. The standard type is 530nm~750nm and the visible spectral type is 380nm~760nm.Compact Sensor Unit
The sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.Strong Product-line
There is a strong products line with the portable type, the manual automatic stage type, the built-in type and the large substrate type etc.- Display 대형기판
대응가능!! - 반도체 Wafer Transfer Robot
결합가능!! - 3D Profiler 및 면저항 측정기와
결합가능!!
Applications
Mesurement for transparent or semi-transparent thin films thikness(D), reflective index(N) and extinction coefficient(K).
(Oxide film, nitride film, photo-resist film, ITO film, etc.)
(Oxide film, nitride film, photo-resist film, ITO film, etc.)
Specifications
| Classification | content | ||
|---|---|---|---|
| Model | 1500A | 2000A | 3000A |
| Wavelength Range | 530~750nm or 380~760nm | ||
| Spot Size | φ1mm or φ0.3mm | ||
| Angle of Incidence | 70゜ | ||
| Film Thickness Repeatability | 1σ＝0.1nm | ||
| Film Thickness Measurement Range | 1nm~2μm | ||
| Measurment Time | Sampling: 20ms~3000ms Analyzing: 300ms |
||
| Sample Stage | φ150mm | φ200mm | φ300mm |
| Maximum Automatic Measurable Points | 200 | 200 | 2,000 |
| Control PC | Laptop PC including analysis software | ||
Configuration
Measurement unit, control unit, control PC (Laptop type) and operation manual (CD).
Compact Light-weighted Portable Type
The Weight of the measurement unit is only 2.2kg. It is easy to be carried for vacuum equipments site acceptance
test and can measure large size samples by detaching its sample stage and putting it directly on samples.
Specifications
| Classification | content |
|---|---|
| Wavelength Range | 530~750nm or 380~760nm |
| Spot Size | φ1mm or φ0.3mm |
| Angle of Incidence | 70゜ |
| Film Thickness Repeatability | 1σ＝0.1nm |
| Film Thickness Measurement Range | 1nm~2μm |
| Measurment Time | Sampling: 20ms~3000ms Analyzing time: 300ms |
| Sample Stage | Fixed Stage (<φ150mm, detachable) |
| Control PC | Laptop PC including analysis software |
Configuration
Measurement unit (including fixed stage), control box、light source unit
control PC (Laptop type) and operation manual (CD).
Manual Stage Type for φ150mm Samples
It is easy to locate measurement points by the easy-to-use manual R-θ stage.
Specifications
| Classification | content |
|---|---|
| Wavelength Range | 530~750nm or 380~760nm |
| Spot Size | φ1mm or φ0.3mm |
| Angle of Incidence | 70゜ |
| Film Thickness Repeatability | 1σ＝0.1nm |
| Film Thickness Measurement Range | 1nm~2μm |
| Measurment Time | Sampling: 20ms~3000ms Analyzing time: 300ms |
| Sample Stage | Manual R-θ stage for φ150mm sample |
| Control PC | Laptop PC including analysis software |
Configuration
Measurement unit (including manual stage), control box、light source unit control PC (Laptop type) and operation manual (CD).
Built-in Type for System Integration
Light-weighted and compact design make it possible to be integrated into various kind of equipments.
It is suitable for both of vacuum and atmospheric pressure environments.
Specifications
| Classification | content |
|---|---|
| Wavelength Range | 530~750nm or 380~760nm |
| Spot Size | φ1mm or φ0.3mm |
| Angle of Incidence | 70゜ |
| Film Thickness Repeatability | 1σ＝0.1nm |
| Film Thickness Measurement Range | 1nm~2μm |
| Measurment Time | Sampling: 20ms~3000ms Analyzing: 300ms |
| Installation Environment | Atmosphere or vacuum |
